Fabrication Of Mesoscale Energy Storage Systems By Laser Direct-Write
نویسندگان
چکیده
منابع مشابه
Fabrication Of Mesoscale Energy Storage Systems By Laser Direct-Write
Over the last two decades, there has been a trend towards the development of smaller and more autonomous electronic devices, yet the question of how to power these microdevices with correspondingly small power sources remains. To address this problem, we employ a laser forward-transfer process in combination with ultraviolet laser micromachining, to fabricate mesoscale electrochemical power sou...
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We have successfully employed laser direct write and micromachining to fabricate high capacity hydrous ruthenium oxide (RuOxHy or RuO2 • xH2O) microultracapacitors. A laser direct-write process is used to deposit uniform pads of RuO2 • 0.5H2O in sulfuric acid under ambient temperature and atmospheric conditions. Ultraviolet laser micromachining is used to tailor the shape and size of the deposi...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2002
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-758-ll3.6